Precision Mechanical Stage
|
The RD180-00 series precision mechanical turntable of Goptica Optics adopts a flat design concept, which can achieve high-precision and high stiffness unrestricted movement in the rotation direction. It can be widely used in wafer process control, wafer slicing, wafer marking, laser heat treatment, photovoltaic cell production and other fields.
Product manual：  |
| Features： | Mechanical dimension diagram： |
- Non cogging motor technology (zero cogging force) ensures high-speed stability - High precision optical linear encoder feedback - Unrestricted angular movement, optional rotation angle hard limit - Chuck vacuum interface, supports multiple gas supply paths - Excellent positioning accuracy and dynamic performance - High precision of end jump and axis jump | 
|
Specifications and Parameters
| RD180-00 |
精度/Accuracy* | 标定前/Uncalibrated | ±30 arcsec |
标定后/Calibrated | ±3 arcsec |
重复精度/Repeatability* | ±2 arcsec |
轴向跳动/Axial Error Motion | ±3 μm |
径向跳动/Radial Error Motion | ±3.5 μm |
倾斜误差/Tilt Error Motion | 10 arcsec |
最大持续转矩/Maximum Torque (Continuous) | 2.4 Nm |
最大转速/Max Speed | 150 rpm |
位置稳定性/Typical position stability(3σ)*(3σ) | ±0.072 arcsec |
Move 1: 1 deg within±40udeg* | 100 ms |
Move 2: 180 deg within±40udeg* | 500 ms |
机械特征/MechanicalSpecifications |
| 外观尺寸/Dimension | 284 mm X 284 mm |
最大负载/Max Load | 轴向/Axia | 7 Kg |
径向/Radial | 3 Kg |
| 转动惯量/Inertia (No load) | 0.00038 Kg.m2 |
*The test data comes from testing using a 20um pitch grating ruler, and the motion table is in an active isolation environment.
Precision mechanical turntable options: In the RD180-00 product series, options are configured that can be selected according to the user's actual application. The optional content includes options such as encoder, Chuck gas supply channels, control system, etc.
| Table 1 Encoder Options |
| -S1 | standard model，Renishaw encoder |
| -S2 | high-end model，Heidenhain encoder |
Table 2 Chuck gas supply options |
| -C1 | Chuck single gas supply |
| -C2 | Chuck dual gas supply |
| -C3 | Chuck's three-way gas supply |
|
Product Picture |
Product Model |
Drawings And Specifications |
Operation |