Precision Air Flotation Turntable
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The ARD120 series precision air floating turntable from Goptica Optics provides excellent angular positioning, speed stability, and error motion performance with its ultra-thin appearance, aiming to meet the strict requirements of wafer inspection, high-precision metrology, X-ray diffraction systems, optical inspection and manufacturing, as well as MEMS&nanotechnology equipment manufacturing.
Product manual：  |
| Features： | Mechanical dimension diagram： |
- High dynamic response, non-contact torque motor drive - High precision optical linear encoder feedback - Design of high stiffness, high-precision enclosed air bearing - Nano level end jump and axis jump accuracy - Ultra thin size design | 
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Specifications and Parameters
| ARD120-00 | ARD180-00 | ARD220-00 |
精度/Accuracy | ±2 arcsec |
重复精度/Repeatability | ±0.5 arcsec |
轴向跳动/Axial Error Motion | <180nm | <100nm |
径向跳动/Radial Error Motion | <450nm | <250nm |
倾斜误差/Tilt Error Motion | <1 arcsec | <0.7 arcsec |
最大持续转矩/Maximum Torque (Continuous) | 0.48 N·m | 2.36 N·m | 5.99 N·m |
最大转速/Max Speed | <1000 rpm | <1000 rpm | <1000 rpm |
机械特征/MechanicalSpecifications |
| 外观尺寸/Dimension | 120mm | 180mm | 220mm |
| 中空直径/Aperture Diameter | 10mm | 30mm | 50mm |
最大负载/Max Load | 轴向/Axia | 8kg | 30kg | 66Kg |
径向/Radial | 4kg | 15kg | 36Kg |
| 工作气压/Operating Pressure | 轴向/Axia | 5bar±0.5bar |
径向/Radial | 6bar±0.5bar |
| 总质量/Total Mass | 4.5kg | 6.1kg | 8.3Kg |
| 平台材料/Material | aviation aluminum, black anodized/hard anodized |
Precision air flotation rotary table optional: In the ARD120 series product series, there are optional options that can be selected according to the user's actual application. The optional content includes options such as size and encoder.
| Table 1 Size Options |
| -120 | 120,air bearing direct drive rotary table |
| -180 | 180,air bearing direct drive rotary table |
| -220 | 220,air bearing direct drive rotary table |
Table 2 Encoder Options |
| -S1 | Incremental analog optical linear encoder，1Vpp |
| -S2 | Incremental digital optical linear encoder，RS422 |
| -S3 | Absolute optical linear encoder，BISS |
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Product Picture |
Product Model |
Drawings And Specifications |
Operation |