Precision Pneumatic Bearing Turntable
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Goptica Optics PART100 precision air bearing turntable is mainly aimed at semiconductor equipment and laser fields; High precision rotation accuracy, providing ultra smooth motion, angular second level accuracy, and absolute repeatability; The advanced manufacturing level ensures the quality and stability of the air bearing; Lightweight design, the product is lightweight and easier to integrate. Product manual：  |
| Features： | Mechanical dimension diagram： |
- Large load, high-precision air bearing - High repeatability, capable of achieving extremely high positioning accuracy - High level processing technology - Flexible customization
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Specifications and Parameters
| PART100 |
台面直径/Tabletop Diameter | 100mm |
高度/Height | 95mm |
中孔尺寸/Aperture | 25mm |
最高转速/Max Speed | 600 rpm@48v |
峰值扭矩/Peak Torque | 3.9N.m |
连续扭矩/Continuous Torque | 3.2N.m |
定位精度/Accuracy | ±1.5arc sec |
重复定位精度/Repeatability | ±1arc sec |
| 负载/Max Load | 轴向(Axial) | 530N |
径向(Radial) | 170N |
| 轴向误差运动（同步）/Axial Error Motion(Synchronous) | <100nm |
径向误差运动（同步）/Radial Error Motion(Synchronous) | <200nm |
倾摆误差运动（同步）/Tilt Error Motion(Synchronous) | <2.5urad |
供气压力/Operating Pressure | 0.5Mpa |
耗气量/Air Consumption | <25L/min |
质量/Total Mass | 4kg |
*The precision detection speed is 60rpm, and the detection standard is GBT+17421.7-2016 (IS0230-7-2006) and GB/T17421.22000. The ambient temperature is 22 °± 0.5C
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Goptica Optics LART150 precision air bearing turntable is mainly aimed at semiconductor equipment and laser fields; Exquisite design ensures a large hollow (diameter 75) within a very small height (65mm); High precision rotation accuracy, providing ultra smooth motion, angular second level accuracy, and absolute repeatability; The advanced manufacturing level ensures the quality and stability of the air bearing.
Product manual： |
| Features： | Mechanical dimension diagram： |
- Large load, high-precision air bearing - High repeatability, capable of achieving extremely high positioning accuracy - High level processing technology - Flexible customization
|  
|
Specifications and Parameters
| PART100 |
台面直径/Tabletop Diameter | 100mm |
高度/Height | 65mm |
中孔尺寸/Aperture | 75mm |
最高转速/Max Speed | 800 rpm |
峰值扭矩/Peak Torque | 8N.m |
连续扭矩/Continuous Torque | 2.6N.m |
定位精度/Accuracy | ±1.5arc sec |
重复定位精度/Repeatability | ±1arc sec |
| 负载/Max Load | 轴向(Axial) | 8kg |
径向(Radial) | 30kg |
| 轴向误差运动（同步）/Axial Error Motion(Synchronous) | <100nm |
径向误差运动（同步）/Radial Error Motion(Synchronous) | <200nm |
倾摆误差运动（同步）/Tilt Error Motion(Synchronous) | <2.5urad |
供气压力/Operating Pressure | 0.5Mpa |
耗气量/Air Consumption | <25L/min |
质量/Total Mass | 5kg |
适配驱动器/Adapted Driver | DC48V driver |
*The precision detection speed is 60rpm, and the detection standard is GBT+17421.7-2016 (1SO230-7-2006) and GB/T17421.22000. The ambient temperature is 22 °± 0.5C
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Product Picture |
Product Model |
Drawings And Specifications |
Operation |