Air Float Gravity Compensation Vertical Displacement Table
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The MZA150-120 series air floating gravity compensation vertical displacement table of Goptica Optics adopts a high-precision anti creep cross roller guide design concept, which can achieve vertical high-precision and high stiffness linear motion. Among them, air flotation gravity compensation technology is adopted to reduce the load on the vertical motor, greatly improving the vertical motion performance and service life. It can be widely applied in fields such as semiconductors, flat panel displays, fiber optic alignment, and biomedicine.
Product manual：  |
| Features： | Mechanical dimension diagram： |
- Dual force compensation, low profile design
- High dynamic response, non-contact linear motor drive - High precision optical linear encoder feedback - Design of high stiffness anti creep cross roller guide rail - Excellent positioning accuracy and dynamic performance
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Specifications and Parameters
| MZA150-120 |
| 行程/Travel | ±60mm |
| 最大速度/Maximum Speed | 200mm/s |
| 加速度/Maximum Acceleration | 1g (Noload) |
| 精度/Accuracy | base | ±2.5μm |
| plus | ±0.275μm |
| 双向重复精度 /Bidirectional Repeatability | base | ±100nm |
| plus | ±75nm |
| 位置稳定性/In PositionStability | 2nm |
| 直线度/Straightness | ±1.5μm |
| 俯仰/Pitch | 10 arcsec |
| 横滚/Roll | 10 arcsec |
| 偏摆/Yaw | 5 arcsec |
| 机械特征/Mechanical Specifications |
| 驱动负载（无负载） /Moving Mass (without payload) | 1.5Kg |
| 最大负载/Max Load Capacity | 14Kg |
| 平台质量/Stage Mass | 3Kg |
| 外观尺寸 (mm)/Dimension(mm) | 140mmx150mmx40mm |
| 平台材料/Materia | aviation aluminum, black anodized |
Air flotation gravity compensation vertical displacement table optional: In the MZA150-120 product series, optional options are configured that can be selected according to the actual application of the user. The optional content includes options such as encoder and high-precision calibration.
Table 1 Encoder Options |
| -S1 | Incremental analog optical linear encoder，1Vpp |
| -S2 | Incremental digital optical linear encoder，RS422 |
| -S3 | Absolute optical linear encoder，BISS |
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Product Picture |
Product Model |
Drawings And Specifications |
Operation |