Maglev Gravity Compensation Vertical Displacement Table
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The MZM200-10 series magnetic levitation gravity compensation vertical displacement platform adopts a compact and flat contour size design concept. The vertical direction adopts the large stroke maglev gravity compensation technology, which reduces the load of the vertical motor and greatly improves the vertical motion performance and service life. It can achieve high-precision vertical positioning for lifting, and vertically provides options for high stiffness mechanical guides and high-performance air floating guides. Air floating guides can provide higher precision bidirectional repeatability. It can be widely used in wafer production control applications, such as thin film measurement, critical dimension inspection, etc.
Product manual： 
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| Features： | Mechanical dimension diagram： |
- High dynamic response, non-contact linear motor drive - High precision optical linear encoder feedback - High rigidity, high-precision guiding design - High load capacity and anti eccentricity ability - Unique large stroke maglev gravity compensation technology - Fully closed-loop servo design - Excellent positioning accuracy and dynamic performance
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Specifications and Parameters
| MZM200-10 |
| 行程/Travel | 10mm |
| 最大速度/Maximum Speed | 100mm/s |
| 加速度/Maximum Acceleration | 2m/s^2 |
| 精度/Accuracy | ±0.5μm |
| 双向重复精度/Bidirectional Repeatability | ±0.2μm |
| 位置稳定性/In-PositionStability | ±15nm |
| 直线度/Straightness | 2μm |
| 俯仰/Pitch | 100 μrad |
| 横滚/Roll | 100 μrad |
| 偏摆/Yaw | 100 μrad |
| 机械特征/Mechanical Specifications |
| 驱动负载（无负载）/Moving Mass (without payload) | 1.8Kg |
| 最大负载/Max Load Capacity | 6.2Kg |
| 平台质量/Stage Mass | 3.5Kg |
| 外观尺寸(mm)/Dimension(mm) | S188 mmX57mm |
| 平台材料/Material | aviation aluminum, black anodized |
Magnetic levitation gravity compensation vertical displacement table optional: In the MZM200-10 product series, optional options are configured that can be selected according to the actual application of the user. The optional content includes options such as travel, encoder, guide rail, etc.
| Table 1 Travel Options |
| -5 | 5mm stroke displacement platform, equipped with voice coil motor and limit |
| -10 | 10mm stroke displacement platform, equipped with voice coil motor and limit |
| -25 | 25mm stroke displacement platform, equipped with voice coil motor and limit |
Table 2 Encoder Options |
| -S1 | Incremental analog optical linear encoder，1Vpp |
| -S2 | Incremental digital optical linear encoder，RS422 |
| -S3 | Absolute optical linear encoder，BISS |
Table 3 Guide rail options |
| -G1 | High stiffness mechanical guide rail |
| -G2 | High performance air floating guide rail |
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Product Picture |
Product Model |
Drawings And Specifications |
Operation |