Stacked Two-dimensional Precision Displacement Table
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The L2S125 series stacked two-dimensional precision displacement table of Goptica Optics adopts an integrated and orthogonal design concept, with compact and flat contour dimensions, which can achieve high-precision and high stiffness linear motion in the horizontal X/Y axis with 2 degrees of freedom. It can be widely applied in fields such as semiconductors, flat panel displays, fiber optic alignment, and biomedicine.
Product manual：  |
| Features： | Mechanical dimension diagram： |
- High dynamic response, non-contact linear motor drive
- High precision linear optical encoder feedback - High stiffness and high-precision guide rail design - Excellent positioning accuracy and repeatability performance
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Specifications and Parameters
| L25125-300 | L25125-400 |
| 行程/Travel | X | Y | X | Y |
| 365mm | 365mm | 410mm | 475mm |
| 最大速度/Maximum Speed | 1m/s | 1m/s | 1m/s | 1m/s |
| 加速度/Maximum Acceleration | 10m/s^2 | 10m/s^2 | 10m/s^2 | 10m/s^2 |
| 定位精度/Position accuracy full stroke | 校准前indicative value | ±20μm |
| 校准后calibration | ±1μm |
| 双向重复精度/Bidirectional Repeatability | ±0.4μm |
| 直线度/Horizontal straightness | ±3μm | ±3.5μm | ±3μm | ±3.5μm |
| 平面度/Nertical straightness | ±2.5μm | ±5μm | ±2.5μm | ±5μm |
| 俯仰/Pitch | ±5μm | ±10μm | ±5μm | ±10μm |
| 横滚/Roll | ±5μm | ±10μm | ±5μm | ±10μm |
| 偏摆/Yaw | ±10μm | ±10μm | ±10μm | ±10μm |
| 正交性/Orthogonality | ±15μm |
| 位置稳定性/Typical position stability (3σ)*(3σ) | ±2nm | ±2nm | ±2nm | ±2nm |
| Move 1:10um within±100nm* | 50ms | 50ms | 50ms | 50ms |
| Move 2:25mm within±100nm* | 140ms | 140ms | 140ms | 140ms |
| Move 3:80mm within±100nm* | 170ms | 170ms | 170ms | 170ms |
| 机械特征/Mechanical Specifications |
| 驱动负载(无负 载)/Moving Mass (without payload) | Upper Axis | 3.6Kg | 4.5Kg |
| Lower Axis | 17Kg | 18.5Kg |
| 最大负载/Max Load Capacity | 2Kg | 6Kg |
| 平台质量/Stage Mass | 29.5Kg | 32Kg |
| 外观尺寸/Dimension | 650mm×604mm×125mm | 810mm×700mm×125mm |
| 平台材料/Material | aviation aluminum, black anodized |
*The test data comes from testing using an 8 μ m pitch grating ruler, and the motion table is in an active isolation environment.
Stackable two-dimensional precision displacement table options: In the L25125 series product series, options are configured that can be selected according to the user's actual application. The optional content includes options such as travel, encoder, high-precision calibration, etc. The X-axis base can be changed to a marble base according to customer needs, which can provide higher positioning accuracy.
| Table 1 Travel Options |
| -300 | 365mmX365mm stroke displacement platform, equipped with voice coil motor and limit |
| -400 | 410mmX475mm stroke displacement platform, equipped with voice coil motor and limit |
Table 2 Encoder Options |
| -S1 | Standard model, Renishaw encoder |
| -S2 | High end model, Heidenhain encoder |
Table 3 Guide rail options |
| -G1 | High rigidity roller guide rail |
| -G2 | High precision ball guide rail
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Product Picture |
Product Model |
Drawings And Specifications |
Operation |