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The Lattice Optics L3S190-350 series stacked 3D linear displacement table adopts modular, ultra-thin design, orthogonal design and other concepts. The MZM200-10 standard module is integrated on the cross platform L2S125 module, which can achieve high-precision and high stiffness linear motion in X, Y and Z axes with 3 degrees of freedom. Among them, the MZM200-10 standard module adopts large stroke maglev gravity compensation technology, which has the function of reducing the load on the vertical motor, greatly improving the vertical motion performance and service life, and achieving high-precision vertical positioning for lifting and lowering. The L2S125 module of the cross platform adopts an integrated and orthogonal design concept, with a compact and flat contour size, which can achieve high-precision and high stiffness linear motion with 2 degrees of freedom in the horizontal X/Y axis. It can be widely used in wafer production control applications, such as thin film measurement, critical dimension inspection, as well as wafer marking and wafer laser annealing.
Product manual： 
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- Stacked 3-axis platform, orthogonal design - Global flatness and straightness reach micrometer level - X/Y axis High stiffness and high-precision guide rail design Consistency design of cable disturbance force
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- Z-axis Vertical magnetic levitation gravity compensation can achieve high positioning accuracy High rigidity, high-precision guiding design Vertical incremental grating, capable of achieving a maximum resolution of 5 nanometers Ultra thin and lightweight design Maximum support for 30mm vertical mechanical travel Maximum support speed 150rpm
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